There are here disclosed a photoresist material for lithography using a light of 220 nm or less which comprises at least a polymer represented by the following formula (2) and a photo-acid generator for generating an acid by exposure:
wherein R
1
, R
2
, R
3
and R
5
are each a hydrogen atom or a methyl group; R
4
is an acid-labile group, an alicyclic hydrocarbon group having 7 to 13 carbon atoms, which has an acid labile group, an alicyclic hydrocarbon group having 7 to 13 carbon atoms, which has a carboxyl group, or a hydrocarbon group having 3 to 13 carbon atoms, which has an epoxy group; R
6
is a hydrogen atom, a hydrocarbon group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 7 to 13 carbon atoms, which has a carboxyl group; x, y and z are optional values which meet x+y+z=1, 0
本文披露了一种光刻用于220nm或更低波长的光的光阻材料,其包括至少由以下化学式(2)表示的聚合物和用于曝光后生成酸的光酸发生剂:其中,R1、R2、R3和R5分别为氢原子或甲基基团;R4为酸敏感基团、具有7至13个碳原子的脂环烃基团,其具有酸敏感基团、具有7至13个碳原子的脂环烃基团,其具有羧基基团,或具有3至13个碳原子的碳氢基团,其具有环氧基团;R6为氢原子、具有1至12个碳原子的碳氢基团,或具有7至13个碳原子的脂环烃基团,其具有羧基基团;x、y和z是可选值,满足x+y+z=1,0
Liquid, curable coating composition based on a hydroxyl groups-containing addition polymer as binder
申请人:AKZO N.V.
公开号:EP0171847B1
公开(公告)日:1988-06-01
NEGATIVE RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD USING THE SAME
申请人:Hoshino Wataru
公开号:US20100203445A1
公开(公告)日:2010-08-12
An object of the present invention is to solve the technical task of enhancing the performance in micro-photofabrication using far ultraviolet light, particularly ArF excimer laser at a wavelength of 193 nm, and more specifically, provide a negative resist composition hardly allowing occurrence of pattern collapse and exhibiting good resolution even in the formation of a fine pattern, and a resist pattern forming method using the composition, which are a negative resist composition comprising (A) an alkali-soluble resin, (B) a compound that contains a low molecular compound having a molecular weight of 2,000 or less and having an oxetane structure, and (C) a cationic photopolymerization initiator, and a resist pattern forming method using the composition.
Immersion oils having long service life
申请人:Carl Zeiss Jena GmbH
公开号:US20210302712A1
公开(公告)日:2021-09-30
An immersion oil for microscopy contains a) a first diester A1 based on a tricyclodecane radical K having one functional group and a first hydrocarbon derivative C1 having two functional groups, and b) a second diester A2 based on the tricyclodecane radical K having one functional group and a second hydrocarbon derivative C2 having two functional groups, where C1 and C2 are different. Methods can be used for the production of the immersion oil and for the use thereof in microscopy.
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