SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME
申请人:ICHIKAWA Koji
公开号:US20100304293A1
公开(公告)日:2010-12-02
A salt represented by the formula (a):
wherein Q
1
and Q
2
each independently represent a fluorine atom etc.,
X
1
represents a single bond etc.,
X
2
represents a single bond etc.,
Y
1
represents a C3-C6 alicyclic hydrocarbon group etc., with the proviso that —X
2
—Y
1
group has one or more fluorine atoms, and
Z
+
represents an organic counter cation, and a photoresist composition comprising the salt represented by the formula (a) and a resin comprising a structural unit having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.
Fluorine-Containing Compound, Fluorine-Containing Polymer Compound, Resist Composition, Top Coat Composition And Pattern Formation Method
申请人:Mori Kazunori
公开号:US20120077126A1
公开(公告)日:2012-03-29
A fluorine-containing polymer of the present invention contains a repeating unit (a) of the general formula (2) and has a mass-average molecular weight of 1,000 to 1,000,000. This polymer is suitably used in a resist composition for pattern formation by high energy ray radiation of 300 nm or less wavelength or electron beam radiation or a top coat composition for liquid immersion lithography and is characterized as having high water repellency, notably high receding contact angle.
In the formula, R
1
represents a polymerizable double bond-containing group; R
2
represents a fluorine atom or a fluorine-containing alkyl group; R
8
represents a substituted or unsubstituted alkyl group or the like; and W
1
represents a single bond, a substituted or unsubstituted methylene group or the like.
[EN] FLUORINE-CONTAINING COMPOUND, FLUORINE-CONTAINING POLYMER COMPOUND, RESIST COMPOSITION, TOP COAT COMPOSITION AND PATTERN FORMATION METHOD<br/>[FR] COMPOSÉ FLUORÉ, COMPOSÉ DE POLYMÈRE FLUORÉ, COMPOSITION DE RÉSERVE, COMPOSITION DE REVÊTEMENT SUPÉRIEUR ET PROCÉDÉ DE FORMATION D'UN MOTIF