申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US07169541B2
公开(公告)日:2007-01-30
There is disclosed a polymer containing at least a repeating unit represented by the following general formula (1), and the resist composition containing the polymer as a base resin, especially a chemically amplified resist composition. There can be provided a resist composition which has etching resistance in a practical use level, and is excellent in an adhesion property with a substrate and an affinity with a developer, and has a sensitivity and resolving power which is far excellent compared with a conventional one, wherein swelling is small at the time of development, especially for photolithography which uses a high-energy beam as a light source, and especially be provided a chemically amplified resist composition
本发明公开了一种聚合物,其中至少包含由以下一般式(1)表示的重复单元,并且该聚合物作为基础树脂包含在抗蚀剂组合物中,特别是化学增感抗蚀剂组合物。可以提供一种抗蚀剂组合物,其在实际使用水平上具有蚀刻抗性,并且在与基板的附着性和与显影剂的亲和性方面表现出色,并且具有远比传统抗蚀剂组合物优异的灵敏度和分辨率,其中在显影时膨胀较小,特别适用于使用高能光束作为光源的光刻技术,特别是提供一种化学增感抗蚀剂组合物。