申请人:Kinoshita Yohei
公开号:US20090035698A1
公开(公告)日:2009-02-05
The present invention is a positive resist composition and a resist pattern forming method including a resin component (A) which has a polymer compound (A1) having a structural units (a1) including an acetal type acid dissociable, dissolution inhibiting group, a structural unit (a2) derived from an acrylate ester having a lactone-containing polycyclic group, and a structural unit (a3) derived from an acrylate ester having a polar group-containing aliphatic hydrocarbon group, and an acid generator component (B) having an onium salt-based acid generator (B1) having a cation portion represented by a general formula (b-1) shown below
[wherein, R
11
represents an alkyl group, an alkoxy group, a halogen atom or a hydroxyl group; R
12
to R
13
each represents, independently, an aryl group or the alkyl group that may have substituent group; n′ represents either 0 or an integer from 1 to 3].
本发明涉及一种正性光阻组合物和一种光阻图案形成方法,包括树脂组分(A)和酸发生剂组分(B)。其中,树脂组分(A)包括聚合物化合物(A1),其具有包括缩醛型酸解离、溶解抑制基的结构单元(a1),源自含有内酯基多环芳香族基团的丙烯酸酯的结构单元(a2),以及源自含有极性基团的脂肪族烃基的丙烯酸酯的结构单元(a3);酸发生剂组分(B)包括一个离子型盐基酸发生剂(B1),其阳离子部分由下式(b-1)表示[其中,R11代表烷基、烷氧基、卤素原子或羟基;R12到R13各自独立地代表芳基或可能具有取代基的烷基;n'代表0或1到3的整数]。