A resin is to be added to a resist composition and localized on a surface of a resist film so as to hydrophobilize the surface of a resist film and has a peak area of a high molecular weight component having a molecular weight of 30,000 or more is 0.1% or less of a total peak area in a molecular weight distribution measured by gel permeation chromatography.
将一种
树脂添加到抗蚀剂组合物中,并固定在抗蚀剂薄膜的表面,使抗蚀剂薄膜的表面疏
水,其分子量为 30,000 或更高的高分子量成分的峰面积占凝胶渗透色谱法测量的分子量分布总峰面积的 0.1%或更少。