Fluorine-containing polymerizable monomers and polymers, anti-reflection film materials and resist compositions using same
申请人:Central Glass Company, Limited
公开号:US20030232940A1
公开(公告)日:2003-12-18
The present invention relates to a fluorine-containing polymerizable monomer having a structure of the general formula (1),
1
where each of R
1
and R
2
is independently a methyl group or trifluoromethyl group, and
each of R
3
and R
4
is independently a hydrogen atom, an alkyl group, a fluorinated alkyl group, a ring structure having an aromatic ring, or an acid-labile protecting group, each of the alkyl group and the fluorinated alkyl group independently having a straight-chain, branched or ring form and having a carbon atom number of 1-25, each of R
3
and R
4
optionally and independently containing at least one of an oxygen atom and a carbonyl bond.
本发明涉及一种含氟可聚合单体,其结构为通式(1),其中R1和R2各自独立地为甲基基团或三氟甲基基团,R3和R4各自独立地为氢原子、烷基、氟代烷基、含有芳香环的环结构或酸敏保护基,烷基和氟代烷基各自具有直链、支链或环形,并具有1-25个碳原子,R3和R4任意且独立地含有至少一个氧原子和一个羰基键。