CYCLOOCTATETRAENETRICARBONYLRUTHENIUM COMPLEX, PROCESS FOR PRODUCING SAME, AND PROCESS FOR PRODUCING FILM USING THE COMPLEX AS RAW MATERIAL
申请人:Tanaka Kikinzoku Kogyo K.K.
公开号:EP2392578B1
公开(公告)日:2017-11-29
CYCLOOCTATETRAENETRICARBONYL RUTHENIUM COMPLEX, METHOD OF PRODUCING THE SAME, AND METHOD OF PRODUCING FILM USING THE COMPLEX AS RAW MATERIAL
申请人:Suzuki Kazuharu
公开号:US20110287175A1
公开(公告)日:2011-11-24
To provide a ruthenium compound suitable for a chemical vapor deposition method (CVD method). A liquid cyclooctatetraenetricarbonyl ruthenium complex represented by the following Formula (1) is obtained by irradiating a solution mixture of dodecacarbonyl triruthenium and a cyclooctatetraene with light.
A satisfactory ruthenium film or ruthenium oxide film can be easily obtained by a chemical vapor deposition method using the complex as a raw material.