POLYMERIZABLE FLUORINATED ESTER COMPOUNDS AND THEIR PREPARING PROCESSES
申请人:Kinsho Takeshi
公开号:US20070249858A1
公开(公告)日:2007-10-25
Polymerizable fluorinated ester compounds having formulae (1) and (2) are novel wherein R
1
is H, methyl or trifluoromethyl, R
2
and R
3
are H or a monovalent hydrocarbon group, R
2
and R
3
may form a ring, R
4
is H, OH or a monovalent hydrocarbon group, and R
5
is an acid labile group. They are useful as monomers to produce polymers for the manufacture of radiation-sensitive resist compositions which have high transparency to radiation having a wavelength of up to 500 nm and exhibit good development properties due to the presence of phenol-like acidic hydroxyl groups.