Lactone compounds having alicyclic structure and their manufacturing method
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US06500961B2
公开(公告)日:2002-12-31
Lactone compounds of formula (1) are useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography.
R1 is H or C1-6 alkyl, R2 is H or an acyl or alkoxycarbonyl group of 1-15 carbon atoms which may be substituted with halogen atoms, Z is a divalent C1-15 organic group which forms a lactone ring with the carbonyloxy group, k is 0 or 1, and m is an integer from 0 to 5.
Novel lactone compounds having alicyclic structure and their manufacturing method
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20020019545A1
公开(公告)日:2002-02-14
Lactone compounds of formula (1) are useful as monomers to form base resins for use in chemically amplified resist compositions adapted for micropatterning lithography.
1
R
1
is H or C
1-6
alkyl, R
2
is H or an acyl or alkoxycarbonyl group of 1-15 carbon atoms which may be substituted with halogen atoms, Z is a divalent C
1-15
organic group which forms a lactone ring with the carbonyloxy group, k is 0 or 1, and m is an integer from 0 to 5.