申请人:AIR PRODUCTS AND CHEMICALS, INC.
公开号:EP3141538A1
公开(公告)日:2017-03-15
A stabilized cyclic alkene composition comprising one or more cyclic alkenes, and at least one stabilizer compound having the Formula (I),
Formula (I) R1,R2,R3,R4,R5(C6)OH
wherein R1 through R5 can each independently be H, OH, C1-C8 linear, branched, or cyclic alkyl, C1-C8 linear, branched, or cyclic alkoxy or substituted or unsubstituted aryl, and wherein the stabilizer compound is present in an amount greater than 200 ppm.
A method for forming a layer of carbon-doped silicon oxide on a substrate, which uses the stabilized alkene composition and a silicon containing compound.
一种稳定环烯组合物,由一种或多种环烯和至少一种具有式 (I) 的稳定剂化合物组成、
式 (I) R1,R2,R3,R4,R5(C6)OH
其中 R1 至 R5 可以各自独立地为 H、OH、C1-C8 直链、支链或环状烷基、C1-C8 直链、支链或环状烷氧基或取代或未取代的芳基,稳定剂化合物的含量大于 200 ppm。
一种在基底上形成掺碳氧化硅层的方法,该方法使用稳定烯组合物和含硅化合物。