An organoruthenium complex represented by the general formula (1-1):
wherein X represents a group represented by the general formula (1-2):
wherein Ra and Rb independently represent a linear or branched alkyl group having 1 to 5 carbon atoms;
Y represents a group represented by the above general formula (1-2), or a linear or branched alkyl group having 1 to 8 carbon atoms;
Z represents a hydrogen atom, or an alkyl group having 1 to 4 carbon atoms; and
L represents an unsaturated hydrocarbon compound having at least two double bonds,
bis(acetylacetonato)(1,5-hexadiene)ruthenium, and bis(acetylacetonato)(1,3-pentadiene)ruthenium have low melting points, and show excellent stability against moisture, air and heat. These ruthenium complexes are suitable for the film formation by a CVD method.
由通式(1-1)表示的
有机钌络合物:
其中 X 代表通式(1-2)所代表的基团:
其中 Ra 和 Rb 分别代表具有 1 至 5 个碳原子的直链或支链烷基;
Y 代表上述通式(1-2)所代表的基团,或具有 1 至 8 个碳原子的直链或支链烷基;
Z 代表氢原子或具有 1 至 4 个碳原子的烷基;以及
L 代表具有至少两个双键的不饱和烃化合物、
双(
乙酰丙酮)(
1,5-己二烯)
钌和双(
乙酰丙酮)(
1,3-戊二烯)
钌的熔点较低,对湿气、空气和热的稳定性极佳。这些
钌络合物适合通过 CVD 法形成薄膜。