A chemical amplification type positive resist composition, which can attain high sensitivity while maintaining high resolution, and comprises (A) a compound of the following formula (I):
1
wherein, R
1
represents a hydrocarbon group optionally having a substituent containing an oxygen atom or nitrogen atom or being optionally substituted by a halogen atom; (B) a resin which itself is insoluble or poorly soluble in an alkaline aqueous solution but becomes soluble in an alkaline aqueous solution by the action of an acid; and (C) a quaternary ammonium salt is provided.
一种
化学放大型正抗蚀剂组合物,可在保持高分辨率的同时实现高灵敏度,它包括 (A) 下式(I)的化合物:
1
其中,R
1
代表烃基,可选择具有含有氧原子或氮原子的取代基,或可选择被卤素原子取代; (B) 一种
树脂,其本身不溶于或难溶于碱性
水溶液,但在酸的作用下可溶于碱性
水溶液;以及 (C) 一种季
铵盐。