Volatile metal amidate metal complexes are exemplified by bis(N-(tert-butyl)ethylamidate)bis(ethylmethylamido) titanium; (N-(tert-butyl)(tert-butyl)amidate)tris(ethylmethylamido) titanium; bis(N-(tert-butyl)(tert-butyl)amidate)bis(dimethylamido) titanium and (N-(tert-butyl)(tert-butyl)amidate)tris(dimethylamido) titanium. The term “volatile” refers to any precursor of this invention having vapor pressure above 0.5 torr at temperature less than 200° C. Metal-containing film depositions using these metal amidate ligands are also described.
挥发性
金属胺基
金属配合物的例子包括双(N-(叔丁基)乙基胺基)双(乙基甲基胺基)
钛;(N-(叔丁基)(叔丁基)胺基)三(乙基甲基胺基)
钛;双(N-(叔丁基)(叔丁基)胺基)双(
二甲基胺基)
钛和(N-(叔丁基)(叔丁基)胺基)三(
二甲基胺基)
钛。术语“挥发性”指的是本发明的任何前体,在低于200°C的温度下,其蒸汽压大于0.5 torr。还描述了使用这些
金属胺基
配体进行含
金属薄膜沉积的方法。