SULFONIUM SALT, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERN FORMING PROCESS
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20150086926A1
公开(公告)日:2015-03-26
A carboxylic acid sulfonium salt having formula (1) is provided wherein R
0
is hydrogen or a monovalent hydrocarbon group, R
01
and R
02
are hydrogen or a monovalent hydrocarbon group, at least one of R
0
, R
01
, and R
02
has a cyclic structure, L is a single bond or forms an ester, sulfonate, carbonate or carbamate bond with the vicinal oxygen atom, R
2
, R
3
and R
4
are monovalent hydrocarbon groups. The sulfonium salt functions as a quencher in a resist composition, enabling to form a pattern of good profile with minimal LWR, rectangularity, and high resolution.
提供了具有公式(1)的羧酸磺酸盐,其中R0为氢或一价烃基,R01和R02为氢或一价烃基,R0、R01和R02中至少有一个具有环状结构,L为单键或与邻位氧原子形成酯、磺酸盐、碳酸酯或氨基甲酸酯键,R2、R3和R4为一价烃基。磺酸盐在抗蚀剂组合物中起到淬灭剂的作用,能够形成具有良好轮廓、最小LWR、矩形度和高分辨率的图案。