Organozirconium composite and method of synthesizing the same, raw material solution containing the same, and method of forming lead zirconate titanate thin film
申请人:MITSUBISHI MATERIALS CORPORATION
公开号:US20040034245A1
公开(公告)日:2004-02-19
The organozirconium composite of the present invention has a decomposition temperature which is near the respective decomposition temperatures of an organolead compound and an organotitanium compound. The raw material solution can precisely control the composition of a PZT thin film over a broad temperature range. The raw material solution is less likely to react an organolead compound even when mixed with the organolead compound. The present invention provides a raw material solution which is less likely to cause vapor phase cracking. The organozirconium composite comprises one, or at least two kinds of zirconium chelate complexes containing, as a ligand, both of a first &bgr; diketone and a second &bgr; diketone having a structure different from that of the first &bgr; diketone, wherein, when at least two kinds of zirconium chelate complexes are contained, the coordination numbers of the first &bgr; diketone and the second &bgr; diketone that coordinate to at least two kinds of zirconium chelate complexes vary depending on the respective zirconium chelate complexes.
Textured (100) yttria‐stabilized zirconia thin films deposited by plasma‐enhanced chemical vapor deposition
作者:H. Holzschuh、H. Suhr
DOI:10.1063/1.105439
日期:1991.7.22
deposited by plasma‐enhanced chemicalvapordeposition on quartz Si(100), Si(111), Ni, and the steels V2A and hastelloy at substrate temperatures (Ts): 673–873 K. The metal β‐diketonates Y(thd)3 and Zr(thd)4 were used as precursors. The fully stabilized fluorite‐type cubic structure was obtained over a wide range of yttria contents from 3.5 to 80 mol % (Ts=773 K). The quality of the films depended on the
Ultrasound assisted synthesis of metal-1,3-diketonates
作者:Nitin S. Nandurkar、Dinkar S. Patil、Bhalchandra M. Bhanage
DOI:10.1016/j.inoche.2008.03.014
日期:2008.7
A simple and convenient methodology for complex formation of wide variety of transition metals/alkaline earth metals with 1,3-diketones under sonication have been reported. The present method showed a significant rate enhancement for metal complex formation in the presence of ultrasound as compared to their silent counterpart, thereby providing higher yields. The role of ultrasound and solvent were also discussed. Moreover, the metal- 1,3-diketonates were characterized by various techniques like FT-IR, (1)H NMR, mass spectrometry and magnetic susceptibility. (c) 2008 Elsevier B.V. All rights reserved.
The decomposition behavior of M(DPM)(n) (DPM = 2,2,6,6-tetramethyl-3,5-heptanedionato; M = Sr, Ba, Cu, Sm, Y, Gd, La, Pr, Fe, Co, Cr, Mn, Ce, Zr; n = 2-4) was studied in detail with infrared spectroscopy and mass spectrometry. The results indicated that the chemical bonds in these compounds dissociate generally following the sequence of C-O > M-O > C-C(CH3)(3) > C-C and C-H at elevated temperatures. The decomposition processes of M(DPM) n are strongly influenced by the coordination number and central metal ion radius. In addition, the decomposed products, in air atmosphere, varied from metal oxides to metal carbonates associated with different M(DPM)(n).
Catalyst Enhanced Chemical Vapor Deposition: Effects on Chemical Vapor Deposition Temperature and Film Purity
作者:Yiping Zhang、Sam W.-K. Choi、Richard J. Puddephatt