六氟异丙醇甲基降冰片烯 | 196314-61-1

• 分子结构分类: 有机化合物 - 有机氧化合物
• 中文名称: 六氟异丙醇甲基降冰片烯
• 中文别名: 3-(双环[2.2.1]-5-庚基)-1,1,1-三氟-2-三氟甲基-2-丙醇；3-(双环[2.2.1]庚-5-烯-2-基)-1,1,1-三氟-2-三氟甲基丙-2-醇；2-(3-氰基苯甲酰)-3-二甲氨基丙烯酸乙酯
• 英文名称: 3-(bicyclo[2.2.1]hept-5-en-2-yl)-1,1,1-trifluoro-2-(trifluoromethyl)propan-2-ol
• 英文别名: 1,1-bis(trifluoromethyl)-2-(bicyclo[2.2.1]hept-5-en-2-yl)ethanol；5-[(1',1',1'-trifluoro-2'-trifluoromethyl-2'-hydroxy)propyl]-2-norbornene；bicyclo[2.2.1]hept-5-ene-2-(3,3,3-trifluoro-2-trifluoromethylpropan-2-ol)；α,α-bis(trifluoromethyl)bicyclo[2.2.1]hept-5-ene-2-ethanol；5-(1,1,1-trifluoro-2-hydroxyl-2-trifluoromethyl-propyl)-norbornene；5-[3,3,3-trifluoro-2-hydroxy-2-(trifluoromethyl)propyl]-norbornene；2-(2-bicyclo[2.2.1]hept-5-enylmethyl)-1,1,1,3,3,3-hexafluoropropan-2-ol
• CAS: 196314-61-1
• 化学式: C₁₁H₁₂F₆O
• 分子量: 274.206
• InChiKey: NIQLOLNJWXWZHX-UHFFFAOYSA-N

物化性质

• 沸点：
  262℃
• 密度：
  1.374
• 闪点：
  112℃

计算性质

• 辛醇/水分配系数(LogP)：
  3.9
• 重原子数：
  18
• 可旋转键数：
  2
• 环数：
  2.0
• sp3杂化的碳原子比例：
  0.82
• 拓扑面积：
  20.2
• 氢给体数：
  1
• 氢受体数：
  7

安全信息

• 危险品标志：
  Xi
• 危险类别码：
  R36/37/38
• 海关编码：
  2906199090
• 安全说明：
  S26,S36/37/39

反应信息

• 作为反应物：
  描述：

  六氟异丙醇甲基降冰片烯 在 甲酸 、 水 作用下， 以84%的产率得到2-hydroxy-5-[(1',1',1'-trifluoro-2'-trifluoromethyl-2'-hydroxy)propyl]norbornane
  参考文献：
  名称：

  Fluorinated vinyl ethers, copolymers thereof, and use in lithographic photoresist compositions

  摘要：

  提供具有结构式（I）的氟化乙烯醚，其中结构式（I）中的X和Y中至少有一个是氟原子，而L、R1、R2、R3、R4如本文所定义。还提供由（I）和可能不是氟化的第二单体进行自由基聚合制备的共聚物。这些聚合物在光刻光阻组合物中很有用，特别是化学放大光阻。在一个首选实施例中，这些聚合物对深紫外（DUV）辐射几乎透明，因此在DUV光刻光阻组合物中很有用。还提供一种使用该组合物在基板上生成抗蚀图像的方法，即在集成电路或类似产品的制造中。

  公开号：

  US20060287558A1
• 作为产物：
  描述：

  2-烯丙六氟异丙醇 、 环戊二烯 生成 六氟异丙醇甲基降冰片烯
  参考文献：
  名称：

  Dissolution behavior of tetrafluoroethylene-based fluoropolymers for 157-nm resist materials

  摘要：

  We have synthesized various main-chain fluorinated polymers and studied base-resin properties, such as transparency at 157 nm, solubility in a standard alkaline developer, and lithographic performance. Main-chain-fluorinated polymers were synthesized by copolymerization of tetrafluoroethylene (TFE) with cyclic monomers, especially newly synthesized norbornene derivatives. We studied the correlation between pK(a)(OH) and the solubility of the copolymers of TFE and functional (fluoroalkyl alcohol group) norbornenes. Their solubility depends on the pK(a) value of the fluoroalkyl alcohol groups.We studied the impact of the polymerization initiators on base-resin properties. High transparency was obtained by using the fluorocarbon initiator. It was also confirmed that the monocyclic component improves dry-etch resistance and that fluorination at the terminal groups improves alkaline solubility.In addition, we found that the development characteristics of TFE/norbornene copolymers were significantly improved by the stereoselective (endo, versus exo) partial protection of the hydroxyl groups in the fluoroalkyl alcohol moiety attached to norbornere unit. The polymer protected only in the exo position of the norbornene unit in the copolymer had a higher R a, and a higher contrast. Positive-working resists based on these fluoropolymers were developed and 55 nm dense lines could be delineated by exposure at 157 nm wavelength with an alternating phase shift mask on a 0.9 NA 157 nm exposure tool. (C) 2004 Elsevier B.V. All rights reserved.

  DOI：

  10.1016/j.jfluchem.2004.09.012

文献信息

• BASIC COMPOUND, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING PROCESS
  申请人：Hatakeyama Jun

  公开号：US20120141938A1

  公开（公告）日：2012-06-07

  A chemically amplified resist composition comprising a base polymer, an acid generator, and an amine quencher in the form of a β-alanine, γ-aminobutyric acid or 5-aminovaleric acid derivative having an acid labile group-substituted carboxyl group has a high contrast of alkaline dissolution rate before and after exposure and forms a pattern of good profile at a high resolution, minimal roughness and wide focus margin.

  一种化学放大型光刻胶组合物，包括基础聚合物、酸发生剂和胺淬灭剂，后者为β-丙氨酸、γ-氨基丁酸或5-氨基戊酸的衍生物，具有一个被酸不稳定基团所取代的羧基，这种组合物在曝光前后具有高对比度的碱性溶解速率，并且能够形成高分辨率、最小粗糙度和宽焦深度的良好图案轮廓。
• Bridged carbocyclic compounds and methods of making and using same
  申请人：AIR PRODUCTS AND CHEMICALS, INC.

  公开号：EP1505050A1

  公开（公告）日：2005-02-09

  Disclosed herein is a fluorinated bridged carbocyclic compound that can be polymerized by itself or with at least one other ethylenically unsaturated monomer to provide a polymer. The polymer may be used, for example, within a sub-300 nm photoresist composition. Also disclosed is a method to make the bridged carbocyclic compound.

  本文披露了一种氟化的桥联碳环化合物，可以单独聚合或与至少一种其他乙烯基不饱和单体一起聚合以提供聚合物。该聚合物可以用于例如在低于300纳米的光刻胶组合物中。还披露了一种制备桥联碳环化合物的方法。
• Methods for Producing Fluorine-Containing Hydroxyaldehyde, Fluorine-Containing Propanediol, and Fluorine-Containing Alcohol Monomer
  申请人：Central Glass Company, Limited

  公开号：US20150361026A1

  公开（公告）日：2015-12-17

  As shown by the following reaction formula, disclosed is a fluorine-containing hydroxyaldehyde production method, including the step of obtaining a fluorine-containing hydroxyaldehyde represented by the general formula (1) by reacting a fluorine-containing ketone represented by the general formula (4) and an aldehyde represented by the general formula (5) in the presence of an organic base selected from a heterocyclic compound which contains a nitrogen atom in its ring or a tertiary amine. By this production method, it is possible to obtain the fluorine-containing hydroxyaldehyde in a high yield. Furthermore, it is possible to easily obtain in high yields a fluorine-containing propanediol, which is a derivative of this fluorine-containing hydroxyaldehyde, and a fluorine-containing alcohol monomer by using the same.

  根据以下反应方程式，揭示了一种含氟羟基醛的生产方法，包括通过在选择的含氟酮（通式（4）表示）和醛（通式（5）表示）在含有从含有氮原子的杂环化合物或三级胺中选择的有机碱的情况下反应，获得由通式（1）表示的含氟羟基醛的步骤。通过这种生产方法，可以高产率地获得含氟羟基醛。此外，可以通过使用相同方法轻松高产率地获得含氟丙二醇（这是这种含氟羟基醛的衍生物）和含氟醇单体。
• GENERATION OF ENDO- AND/OR EXO-NORBORNENECARBOXALDEHYDE AS AN INTERMEDIATE TO FUNCTIONALIZED NORBORNENES
  申请人：Bell Andrew

  公开号：US20090118539A1

  公开（公告）日：2009-05-07

  Embodiments in accordance with the present invention provide for forming essentially pure diastereomers of 5/6-substituted norbornene-type monomers. Further, embodiments in accordance with the present invention encompass polymerizing such diastereomers to form addition or ROMP polymers where a desired exo-/endo-ratio of the diastereomers is provided to the polymerization, such ratio designed to provide a desired ratio of endo-/exo-structured repeating units for a resulting polymer to have desired physical or chemical properties.

  根据本发明的实施例，提供形成基本纯的5/6-取代去氢莰烯型单体的异构体。此外，根据本发明的实施例涵盖聚合这种异构体以形成加成或ROMP聚合物，其中所提供给聚合反应的异构体的期望外/内比例设计为提供所得聚合物具有期望的物理或化学性质的外/内结构重复单元的期望比例。
• Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method
  申请人：Central Glass Company, Ltd.

  公开号：US20040225159A1

  公开（公告）日：2004-11-11

  A fluorine-containing cyclic compound is represented by the formula 1: 1 wherein each of R 1 , R 2 and R 3 independently represents a hydrogen, alkyl group, fluorine, fluoroalkyl group or hexafluorocarbinol group, wherein at least one of the hexafluorocarbinol groups may partly or totally be protected with a protecting group, and wherein the protecting group is (a) a straight-chain, branched or cyclic hydrocarbon group having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group and optionally contains a fluorine atom, oxygen atom, nitrogen atom or carbonyl bond.

  含氟的环状化合物由以下式表示： 1 其中，R 1 ，R 2 和R 3 分别独立地表示氢、烷基、氟、氟烷基或六氟甲基团， 其中至少一个六氟甲基团可以部分或完全被保护基保护， 保护基为(a)具有碳原子数为1-25的直链、支链或环烃基团，或(b)芳香烃基团，可选地含有氟原子、氧原子、氮原子或羰基键。