Fluorine-Containing Compound, Fluorine-Containing Polymer, Postive-Type Resist Composition, And Patterning Process Using Same
申请人:ISONO Yoshimi
公开号:US20080311507A1
公开(公告)日:2008-12-18
Disclosed is a fluorine-containing compound represented by formula (1),
wherein R
1
represents a polymerizable double-bond containing group, R
2
represents an acid-labile protecting group, R
3
represents a fluorine atom or fluorine-containing alkyl group, and W represents a bivalent linking group. This compound can provide a fluorine-containing polymer compound that has a weight-average molecular weight of 1,000-1,000,000 and contains a repeating unit represented by formula (2),
wherein R
2
, R
3
and W are defined as above, each of R
4
, R
5
and R
6
independently represents a hydrogen atom, fluorine atom or monovalent organic group, at least two of R
4
, R
5
and R
6
may be combined to form a ring. This polymer compound can provide a resist composition capable of forming a pattern that is transparent to exposure light and superior in rectangularity.
本发明涉及一种含氟化合物,其化学式为(1),其中R1代表可聚合的双键含基团,R2代表酸易保护基,R3代表氟原子或含氟烷基团,W代表双价连结基团。该化合物可提供一种含氟聚合物化合物,其重均分子量为1,000-1,000,000,并含有由式(2)所表示的重复单元,其中R2、R3和W如上所定义,R4、R5和R6中的每一个独立地代表氢原子、氟原子或一价有机基团,其中至少两个R4、R5和R6可以组成环。该聚合物化合物可提供一种抗蚀剂组合物,能够形成对曝光光线透明且在矩形度方面优越的图案。