POLYMER COMPOUND, PHOTORESIST COMPOSITION CONTAINING SUCH POLYMER COMPOUND, AND METHOD FOR FORMING RESIST PATTERN
申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:EP1717261A1
公开(公告)日:2006-11-02
The present invention provides a polymer compound which can constitute a photoresist composition which is capable of having an excellent resolution, forming a fine pattern with a good rectangularity, obtaining favorable resist characteristics even when acid strength of a acid generated from an acid generator is weak, and having favorable sensitivity; a photoresist composition including the polymer compound; and a resist pattern formation method using the photoresist composition. The photoresist composition and the resist pattern formation method use the polymer compound including an alkali soluble group (i), wherein the alkali soluble group (i) is at least one substituent group selected from an alcoholic hydroxyl group, a carboxyl group, or a phenolic hydroxyl group, and the substituent group is protected by an acid dissociable, dissolution inhibiting group (ii) represented by a general formula (1):
(wherein R1 represents a cycloaliphatic group which contains no more than 20 carbon atoms and may contain an oxygen atom, a nitrogen atom, a sulfur atom, or a halogen atom, and n represents 0 or an integer of 1 to 5.).
本发明提供了一种聚合物化合物,它可以构成一种光刻胶组合物,该组合物能够具有极佳的分辨率,形成具有良好矩形度的精细图案,即使在酸发生器产生的酸的酸强度较弱时也能获得良好的抗蚀特性,并且具有良好的灵敏度;一种包括该聚合物化合物的光刻胶组合物;以及一种使用该光刻胶组合物的抗蚀图案形成方法。光刻胶组合物和抗蚀剂图案形成方法使用包括碱溶性基团(i)的聚合物化合物,其中碱溶性基团(i)是至少一个选自醇羟基、羧基或酚羟基的取代基,取代基被通式(1)表示的可酸解、溶解抑制基团(ii)保护:
(其中 R1 代表含不超过 20 个碳原子的环脂族基团,可包含氧原子、氮原子、硫原子或卤素原子,n 代表 0 或 1 至 5 的整数)。