GENERATION OF ENDO- AND/OR EXO-NORBORNENECARBOXALDEHYDE AS AN INTERMEDIATE TO FUNCTIONALIZED NORBORNENES
申请人:Bell Andrew
公开号:US20090118539A1
公开(公告)日:2009-05-07
Embodiments in accordance with the present invention provide for forming essentially pure diastereomers of 5/6-substituted norbornene-type monomers. Further, embodiments in accordance with the present invention encompass polymerizing such diastereomers to form addition or ROMP polymers where a desired exo-/endo-ratio of the diastereomers is provided to the polymerization, such ratio designed to provide a desired ratio of endo-/exo-structured repeating units for a resulting polymer to have desired physical or chemical properties.
New monomers, norbornenylmethyl fluoroalkyl ethers, made by reaction of bicyclo(2,2,1)hept-5-ene-2-methanol with fluoro(alkyl vinyl ethers), are described. These monomers are useful in making polymers such as hydrophobic, hydrolytically-resistant polymers for photoresists, particularly for use in photoimaging by immersion lithography with 193 nm light.
Embodiments in accordance with the present invention provide for the use of polycycloolefins in electronic devices and more specifically to the use of such polycycloolefins as gate insulator layers used in the fabrication of electronic devices, the electronic devices that encompass such polycycloolefin gate insulator and processes for preparing such polycycloolefin gate insulator layers and electronic devices.
Fluorine free photopatternable phenol functional group containing polymer compositions
申请人:PROMERUS, LLC
公开号:US10054854B2
公开(公告)日:2018-08-21
Various polycycloolefinic polymers containing phenolic pendent groups and compositions thereof useful for forming self-imageable films encompassing such polymers are disclosed. Such polymers encompass norbornene-type repeating units containing phenolic pendent groups which contain very low levels of fluorine containing monomers. The films formed from such polymer compositions provide self imageable, low-k, thermally stable layers for use in microelectronic and optoelectronic devices.
本发明公开了各种含酚醛悬垂基团的聚环烯烃聚合物及其用于形成包含此类聚合物的自成像薄膜的组合物。此类聚合物包含降冰片烯类重复单元,其中含有含氟单体含量极低的酚醛悬垂基团。由此类聚合物组合物形成的薄膜具有自成像、低 K 值、热稳定的特性,可用于微电子和光电设备。
Permanent dielectric compositions containing photoacid generator and base
申请人:PROMERUS, LLC
公开号:US10429734B2
公开(公告)日:2019-10-01
Embodiments encompassing a series of compositions containing photoacid generator (PAG) and a base are disclosed and claimed. The compositions are useful as permanent dielectric materials. More specifically, embodiments encompassing compositions containing a series of copolymers of a variety of norbornene-type cycloolefinic monomers and maleic anhydride in which maleic anhydride is fully or partially hydrolyzed (i.e., ring opened and fully or partially esterified), PAG and a base, which are useful in forming permanent dielectric materials having utility in a variety of electronic material applications, among various other uses, are disclosed.