Disclosed are a salt represented by formula (1), and an acid generator and a resist composition which include the same:
wherein R1 represents a fluorine atom or a fluorinated alkyl group; R2, R3 and R4 each represent a halogen atom, a fluorinated alkyl group or a hydrocarbon group; m2 and m3 represent an integer of 0 to 4; m4 represents an integer of 0 to 5; Q1 and Q2 each represent a fluorine atom or a perfluoroalkyl group; L1 represents a saturated hydrocarbon group, —CH2- included in the group may be replaced by —O— or —CO—, and a hydrogen atom included in the group may be substituted with a fluorine atom or a hydroxy group; Y1 represents a methyl group which may have a substituent or an alicyclic hydrocarbon group which may have a substituent.
本发明涉及一种由式(1)表示的盐,以及包括该盐的酸发生剂和抗蚀组合物:
其中,R1代表
氟原子或
氟化烷基;R2、R3和R4各代表卤素原子、
氟化烷基或烃基;m2和m3代表0到4的整数;m4代表0到5的整数;Q1和Q2各代表
氟原子或
全氟烷基;L1代表饱和烃基,其中包括在该基团中的-
CH2-可被替换为-O-或-CO-,该基团中包括的氢原子可被
氟原子或羟基取代;Y1代表可带有取代基的甲基基团或可带有取代基的脂
环烃基团。