Vinylphenylpropionic acid derivatives; processes for producing the derivatives; polymers of the same; and radiosensitive resin compositions containing the polymers. The above polymers exhibit low radiation absorption and are useful as the resin component of radiosensitive resin compositions particularly suitable for chemically amplified resists. For example, t-butyl 4-vinylphenylpropionate is produced by (1) reacting t-butyl bromoacetate with tri(n-butyl)phosphine to obtain a quaternary phosphonium salt, (2) reacting this salt with a base to obtain a phosphorus ylide, (3) reacting this ylide with 2,4,6-tris(3′,5′-di-t-butyl-4′-hydroxybenzyl)methyl-styrene to obtain a quaternary phosphonium salt, and (4) hydrolyzing this salt.
乙烯基苯丙酸衍
生物;制备该衍
生物的方法;相同的聚合物;以及含有该聚合物的放射敏感
树脂组合物。上述聚合物具有低辐射吸收,并且可用作放射敏感
树脂组合物的
树脂组分,特别适用于
化学增感抗蚀剂。例如,叔丁基4-
乙烯基苯丙酸酯是通过以下步骤制备的:(1)将叔丁基
溴乙酸酯与三
正丁基膦反应,得到季
铵膦盐,(2)将该盐与碱反应,得到膦叶立德,(3)将该叶立德与2,4,6-三(3′,5′-二叔丁基-4′-羟基苯基)甲基-
苯乙烯反应,得到季
铵膦盐,(4)
水解该盐。