A salt represented by the formula (I-BB):
wherein Q
1
and Q
2
each independently represent a fluorine atom etc.,
X
1
represents a single bond etc.,
Y
1
represents a C1-C36 aliphatic hydrocarbon group etc.,
A
1
and A
2
independently each represents a C1-C20 aliphatic hydrocarbon group etc.,
Ar
1
represents a (m
4
+1)-valent C6-C20 aromatic hydrocarbon group which can have one or more substituents,
B
1
represents a single bond etc.,
B
2
represents a C4-C36 alicyclic hydrocarbon group which has one or more —OX
a
groups and which is not capable of being eliminated by the action of an acid etc., and X
a
represents a hydrogen atom or a group capable of being eliminated by the action of an acid, m
1
and m
2
independently each represents an integer of 0 to 2, m
3
represents an integer of 1 to 3, with the proviso that m
1
plus m
2
plus m
3
equals 3, and m
4
represents an integer of 1 to 3.
由公式(I-BB)表示的盐,其中Q1和Q2各自独立代表一个
氟原子等,X1代表一个单键等,Y1代表一个C1-C36脂肪烃基等,A1和A2各自独立代表一个C1-C20脂肪烃基等,Ar1代表一个(m4+1)价的C6-C20
芳香烃基,该
芳香烃基可以有一个或多个取代基,B1代表一个单键等,B2代表一个C4-C36的脂
环烃基,该脂
环烃基具有一个或多个—OXa基团,并且不能通过酸的作用被消除,Xa代表一个氢原子或一个可以通过酸的作用被消除的基团,m1和m2各自独立代表一个0到2的整数,m3代表一个1到3的整数,前提是m1加m2加m3等于3,且m4代表一个1到3的整数。