Antireflective, layer-forming composition, layer configuration containing the antireflective layer, and process for producing the antireflective layer
申请人:——
公开号:US20020198294A1
公开(公告)日:2002-12-26
A layer-forming antireflective composition is proposed which contains as a base polymer poly(hydroxyamide) or polybenzoxazole and as dye component at least one dye from the classes of the methine dyes, methine dye derivatives, azomethine dyes, azomethine dye derivatives, coumarin dyes, coumarin dye derivatives, triphenylmethane dyes, triphenylmethane dye derivatives and/or an azo dye.
本发明提出了一种成层抗反射组合物,该组合物含有作为基体聚合物的聚羟酰胺或聚苯并噁唑,以及作为染料组分的至少一种染料,这些染料来自甲胺染料、甲胺染料衍生物、偶氮甲胺染料、偶氮甲胺染料衍生物、香豆素染料、香豆素染料衍生物、三苯基甲烷染料、三苯基甲烷染料衍生物和/或偶氮染料。