申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US10241406B2
公开(公告)日:2019-03-26
A resist composition containing a resin component having a structural unit represented by general formula (a0-1), and a compound represented by general formula (b1). In general formula (a0-1), R is a hydrogen atom, an alkyl group, or a halogenated alkyl group. Va1 is a divalent hydrocarbon group. na1 represents an integer of 0 to 2. Ra′12 and Ra′13 are a monovalent chain saturated hydrocarbon group having 1 to 10 carbon atoms or a hydrogen atom. Ra′14 is a phenyl group, a naphthyl group, or an anthryl group. In general formula (b1), Rb1 represents a cyclic hydrocarbon group. Yb1 represents a divalent linking group containing an ester bond. Vb1 represents an alkylene group, a fluorinated alkylene group, or a single bond. m is an integer of 1 or more, and Mm+ is an m-valent organic cation.
一种抗蚀剂组合物,含有具有通式(a0-1)表示的结构单元的树脂成分和通式(b1)表示的化合物。在通式(a0-1)中,R 是氢原子、烷基或卤代烷基。Va1是二价烃基,na1代表0至2的整数。 Ra′12和Ra′13是具有1至10个碳原子的单价链饱和烃基或氢原子。Ra′14 是苯基、萘基或蒽基。通式(b1)中,Rb1 代表环状烃基。Yb1 代表含有酯键的二价连接基团。Vb1 代表亚烷基、氟化亚烷基或单键。m 为 1 或 1 以上的整数,Mm+ 为 m 价有机阳离子。