Esters of acetyllactyllactic acid and process for making same
申请人:CLABORN HOUSTON V
公开号:US02350388A1
公开(公告)日:1944-06-06
BLOCK COPOLYMERS FOR DIRECTED SELF-ASSEMBLY APPLICATIONS
申请人:International Business Machines Corporation
公开号:US20170114246A1
公开(公告)日:2017-04-27
Block copolymers (BCPs) for self-assembly applications comprise a linear fluorinated linking group L′ joining a pair of adjacent blocks. A film layer comprising a BCP, which is disposed on an underlayer and in contact with an atmosphere, is capable of forming a perpendicularly oriented domain pattern when the underlayer is preferentially wetted by one domain of an otherwise identical self-assembled BCP in which all fluorines of L′ are replaced by hydrogen. The BCP can be a low-chi or high-chi BCP. In a preferred embodiment, the BCP comprises a styrene-based first block, and a second block comprises a carbonate and/or ester repeat unit formed by ring opening polymerization of a cyclic carbonate and/or cyclic ester monomer. The linking group L′ has a lower surface energy than each of the polymer blocks.
HIGH-CHI BLOCK COPOLYMERS FOR INTERCONNECT STRUCTURES BY DIRECTED SELF-ASSEMBLY
申请人:International Business Machines Corporation
公开号:US20170294341A1
公开(公告)日:2017-10-12
High-chi diblock copolymers are disclosed whose self-assembly properties are suitable for forming hole and bar openings for conductive interconnects in a multi-layered structure. The hole and bar openings have reduced critical dimension, improved uniformity, and improved placement error compared to the industry standard poly(styrene)-b-poly(methyl methacrylate) block copolymer (PS-b-PMMA). The BCPs comprise a poly(styrene) block, which can optionally include repeat units derived from trimethylsilyl styrene, and a second block that can be a polycarbonate block or a polyester block. Block copolymers comprising a fluorinated linking group L′ comprising 1-25 fluorines between the blocks can provide further improvement in uniformity of the openings.
US9768059B1
申请人:——
公开号:US9768059B1
公开(公告)日:2017-09-19
Filachione; Lengel; Fisher, Journal of the American Chemical Society, 1946, vol. 68, p. 332