A highly efficient multienzyme system for the one-step synthesis of a sialyl trisaccharide: in situ generation of sialic acid and N-acetyllactosamine coupled with regeneration of UDP-glucose, UDP-galactose and CMP-sialic acid
PRECURSORS AND METHODS FOR PREPARING SILICON-CONTAINING FILMS
申请人:ENTEGRIS, INC.
公开号:US20210301400A1
公开(公告)日:2021-09-30
Provided are certain liquid silicon precursors useful for the deposition of silicon-containing films, such as films comprising silicon, silicon nitride, silicon oxynitride, silicon dioxide, silicon carbide, carbon-doped silicon nitride, or carbon-doped silicon oxynitride. Also provided are methods for forming such films utilizing vapor deposition techniques.
[EN] PRECURSORS AND METHODS FOR PREPARING SILICON-CONTAINING FILMS<br/>[FR] PRÉCURSEURS ET PROCÉDÉS DE PRÉPARATION DE FILMS CONTENANT DU SILICIUM
申请人:ENTEGRIS INC
公开号:WO2021202315A1
公开(公告)日:2021-10-07
Provided are certain liquid silicon precursors useful for the deposition of silicon-containing films, such as films comprising silicon, silicon nitride, silicon oxynitride, silicon dioxide, silicon carbide, carbon-doped silicon nitride, or carbon-doped silicon oxynitride. Also provided are methods for forming such films utilizing vapor deposition techniques.