Novel photoacid generator compounds are provided. Photoresist compositions that include the novel photoacid generator compounds are also provided. The invention further provides methods of making and using the photoacid generator compounds and photoresist compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications.
提供了新型光酸发生剂化合物。还提供了包括这些新型光酸发生剂化合物的光阻组合物。本发明还提供了制备和使用所述光酸发生剂化合物和光阻组合物的方法。这些化合物和组合物可用作
化学增强型抗蚀组合物中的光活性组分,适用于各种微加工应用。