Disclosed are a (meth)acrylate compound, a photosensitive polymer, and a resist composition, and the (meth)acrylate compound includes a lactone-group-containing (meth)acrylate compound represented by the following Chemical Formula 1.
本发明涉及一种(甲基)
丙烯酸酯化合物、一种光敏聚合物和一种抗蚀组合物,其中(甲基)
丙烯酸酯化合物包括下述
化学式1所表示的含有内酯基的(甲基)
丙烯酸酯化合物。