To provide a resist protective film material for immersion lithography.
An alkali soluble resist protective film material for immersion lithography, which comprises a polymer (F) containing repeating units (FU) formed by polymerizing a polymerizable compound (fm) having a fluorine-containing bridged cyclic structure. For example, repeating units (FU) are repeating units formed by polymerizing a compound (f) selected from the group consisting of the following formulae (f1) to (f4) (RF represents H, F, a C1-3 alkyl group or a C1-3 fluoroalkyl group, and XF represents F, OH or CH2OH.)
提供一种用于浸入式光刻的抗蚀剂保护膜材料。
一种用于浸渍光刻的碱溶性抗蚀剂保护膜材料,它包括一种聚合物(F),其中含有通过聚合具有含
氟桥环结构的可聚合化合物(fm)而形成的重复单元(FU)。例如,重复单元 (FU) 是通过聚合选自下式 (f1) 至 (f4) 组的化合物 (f) 而形成的重复单元(RF 代表 H、F、C1-3 烷基或 C1-3 氟烷基,XF 代表 F、OH 或 CH2OH)。