申请人:Hitachi Chemical Co., Ltd.
公开号:US05164816A1
公开(公告)日:1992-11-17
An integrated circuit device wherein layer insulation is attained by at least one of (i) an insulator layer interposed between two adjacent conductor layers, and (ii) a surface protecting layer fixedly covering the surface of the semiconductor chip, each of the insulator layer and the surface protecting layer being made of a heat-resistant resin obtainable by heating a heat-resistant resin paste. Said paste consists essentially of a first organic liquid, a second organic liquid, a heat-resistant resin (B) which is soluble in an organic liquid mixture consisting of the first organic liquid and the second organic liquid, and fine particles of a heat-resistant resin (C) which is soluble in the first organic liquid but insoluble in the second organic liquid. The first organic liquid, the second organic liquid and the heat-resistant resin (B) are brought into a solution in which the fine particles of a heat-resistant resin (C) are dispersed.
一种集成电路器件,其中层绝缘通过至少以下方法之一实现:(i)介于两个相邻导体层之间的绝缘层;(ii)固定覆盖半导体芯片表面的表面保护层。绝缘层和表面保护层均由通过加热耐热树脂浆获得的耐热树脂制成。所述浆料主要由第一有机液体、第二有机液体、耐溶于第一有机液体但不溶于第二有机液体的耐热树脂(C)的微粒和耐溶于由第一有机液体和第二有机液体组成的有机液体混合物的耐热树脂(B)组成。将第一有机液体、第二有机液体和耐热树脂(B)溶解在一起,其中分散着耐热树脂(C)的微粒。