Bridged carbocyclic compounds and methods of making and using same
申请人:AIR PRODUCTS AND CHEMICALS, INC.
公开号:EP1505050A1
公开(公告)日:2005-02-09
Disclosed herein is a fluorinated bridged carbocyclic compound that can be polymerized by itself or with at least one other ethylenically unsaturated monomer to provide a polymer. The polymer may be used, for example, within a sub-300 nm photoresist composition. Also disclosed is a method to make the bridged carbocyclic compound.