申请人:DAICEL CORPORATION
公开号:US10308758B2
公开(公告)日:2019-06-04
Provided are a filling component useful for the production of a thin, low-profile three-dimensional integrated semiconductor device via a COW process, and a curable composition for the formation of the filling component. The filling component according to the present invention for three-dimensional mounting of semiconductor elements is used to fill gaps between laterally adjacent semiconductor elements in the production of a three-dimensional integrated semiconductor device by stacking and integrating semiconductor elements. The filling component is a component that is polished and/or ground flat from the front side of semiconductor elements while gaps between the semiconductor elements are filled with the filling component.
本发明提供了一种用于通过 COW 工艺生产薄型、低剖面三维集成半导体器件的填充元件,以及一种用于形成该填充元件的可固化组合物。根据本发明的用于半导体元件三维安装的填充组件,在通过堆叠和集成半导体元件生产三维集成半导体器件时,用于填充横向相邻半导体元件之间的间隙。填充部件是一种从半导体元件正面抛光和/或磨平的部件,半导体元件之间的间隙由填充部件填充。