COBALT COMPLEX, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING COBALT-CONTAINING THIN FILM
申请人:TOSOH CORPORATION
公开号:US20220017553A1
公开(公告)日:2022-01-20
To provide a cobalt complex which is liquid at room temperature, useful for producing a cobalt-containing thin film under conditions without using an oxidizing gas.
A cobalt complex represented by the following formula (1):
L
1
-Co-L
2
(1)
wherein L
1
and L
2
represent a unidentate amide ligand of the following formula (A), a bidentate amide ligand of the following formula (B) or a hetero atom-containing ligand of the following formula (C):
wherein R
1
and R
2
represent a C
1-6
alkyl group or a tri(C
1-6
alkyl)silyl group, and the wave line represents a binding site to the cobalt atom;
wherein R
3
represents a tri(C
1-6
alkyl)silyl group, R
4
and R
5
represent a C
1-4
alkyl group, and X represents a C
1-6
alkylene group;
wherein R
6
and R
8
represent a C
1-6
alkyl group, R
7
represents a hydrogen atom or a C
1-4
alkyl group, Y represents an oxygen atom or NR
9
, Z represents an oxygen atom or NR
10
, and R
9
and R
10
independently represent a C
1-6
alkyl group.