作者:W. Jeffrey McCarty、Xiaoping Yang、Lauren J. DePue Anderson、Richard A. Jones
DOI:10.1039/c1dt11649e
日期:——
New dinuclear rhodium(II) pyrazolate (Pz) complexes of formula Rh2(3-R,5-R′Pz)4·2L (R = R′ = CF3, L = H2O (1), CH3CN (2)) and Rh2(3-R,5-R′Pz)4 (R = R′ = tBu (3); R = CF3, R′ = tBu (4)) have been synthesized from the interaction of the lithium salt of the corresponding pyrazole with Rh2(OAc)4 in diethyl ether. The complexes were characterized by X-ray crystallography and spectroscopic methods. They were further evaluated as precursors for the chemical vapor deposition (CVD) of Rh thin films using H2 as the carrier gas. The resulting films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS).
新双核铑(II)吡唑酸盐(Pz)复合物,化学式为Rh2(3-R,5-R′Pz)4·2L (R = R′ = CF3, L = H2O (1), CH3CN (2)) 和 Rh2(3-R,5-R′Pz)4 (R = R′ = tBu (3); R = CF3, R′ = tBu (4)),是通过相应吡唑的锂盐与Rh2(OAc)4在二乙醚中的相互作用合成的。通过X射线晶体学和光谱方法对这些复合物进行了表征。它们进一步被评估为使用H2作为载气的铑薄膜化学气相沉积(CVD)的前驱体。得到的薄膜通过扫描电子显微镜(SEM)、X射线衍射(XRD)和X射线光电子能谱(XPS)进行了表征。