New polymers are provided that have non-carbon tetravalent species (Si, Ti, Ge, Zr, Sn) and photoimageable compositions that contain such polymers. Preferred polymers are organic, e.g. one or more polymer repeat units comprise carbon atom(s). Particularly preferred are polymers that comprise SiO
2
or TiO
2
repeat units and which can be highly useful as a resin component of resists imaged at short wavelengths such as sub-300 nm and sub-200 nm.
提供了新的聚合物,其中包含非碳四价物种(Si,Ti,Ge,Zr,Sn),以及包含这些聚合物的可成像光敏组合物。首选聚合物是有机的,例如一个或多个聚合物重复单元包含碳原子。特别优选的是包含SiO2或TiO2重复单元的聚合物,可作为在短波长下成像的光阻
树脂组分,例如亚300 nm和亚200 nm。