RADIATION-SENSITIVE COMPOSITION CHANGING IN REFRACTIVE INDEX AND METHOD OF CHANGING REFRACTIVE INDEX
申请人:JSR Corporation
公开号:EP1350814A1
公开(公告)日:2003-10-08
A radiation sensitive refractive index changing composition comprising (A) a decomposable compound, (B) a non-decomposable compound having a higher refractive index than the decomposable compound (A), (C) a radiation sensitive decomposer and (D) astabilizer. By exposing this composition to radiation through a pattern mask, the above components (C) and (A) of an exposed portion decompose to create a refractive index difference between the exposed portion and an unexposed portion, thereby forming a pattern having different refractive indices.
一种对辐射敏感的折射率变化组合物,包括:(A) 可分解化合物;(B) 折射率高于可分解化合物(A)的不可分解化合物;(C) 对辐射敏感的分解剂;(D) 稳定剂。通过图案掩膜将这种组合物暴露在辐射下,暴露部分的上述成分(C)和(A)分解,在暴露部分和未暴露部分之间产生折射率差,从而形成具有不同折射率的图案。