Ruthenium compound, material for thin film formation, and process for thin film formation
申请人:ADEKA CORPORATION
公开号:US10167304B2
公开(公告)日:2019-01-01
Disclosed is a ruthenium compound useful as a precursor in chemical vapor growth, particularly ALD. The compound has good reactivity with a reactive gas, a high vapor pressure, and a low melting point. The compound is represented by general formula (I), wherein R1, R2, and R3 each independently represent a straight or branched chain alkyl group having 1 to 5 carbon atoms, provided that the total number of the carbon atoms of R1 and R2 is 3 to 10. In formula (I), R1 and R2 are each preferably ethyl or isopropyl.
本发明公开了一种可用作化学气相生长(尤其是 ALD)前驱体的钌化合物。该化合物与活性气体的反应性好,蒸汽压高,熔点低。该化合物由通式 (I) 表示,其中 R1、R2 和 R3 各自独立地代表具有 1 至 5 个碳原子的直链或支链烷基,但 R1 和 R2 的碳原子总数为 3 至 10。在式 (I) 中,R1 和 R2 各自最好是乙基或异丙基。