Photosensitive element, laminate, permanent mask resist, method for producing same, and method for producing semiconductor package
申请人:HITACHI CHEMICAL COMPANY, LTD.
公开号:US11054744B2
公开(公告)日:2021-07-06
Provided is a photosensitive element including a support film, and a photosensitive layer provided on the support film and formed from a photosensitive resin composition, in which the surface roughness of the surface of the support film that is in contact with the photosensitive layer is 200 to 4,000 nm.
本发明提供了一种光敏元件,包括支撑膜和设置在支撑膜上并由光敏树脂组合物形成的光敏层,其中与光敏层接触的支撑膜表面的粗糙度为 200 至 4,000 nm。