申请人:Daicel Chemical Industries, Ltd.
公开号:EP1172694A1
公开(公告)日:2002-01-16
A photoresist polymeric compound includes a monomer unit represented by following Formula (I) :
The polymeric compound may further include at least one of monomer units represented by following Formulae (IIa) to (IIg):
wherein R1, R13, R14 and R15 are each a hydrogen atom or methyl group; R2 and R3 are each a hydrocarbon group having from 1 to 8 carbon atoms; R4, R5 and R6 are each a hydrogen atom, hydroxyl group or a methyl group; R7 and R8 are each a hydrogen atom, hydroxyl group or -COOR9 group, where R9 is a t-butyl group, 2-tetrahydropyranyl group, etc.; R10 and R11 are each a hydrogen atom, hydroxyl group or oxo group; R12 is a hydrocarbon group having a tertiary carbon atom at a bonding site with an oxygen atom indicated in the formula; R16 is a t-butyl group, 2-tetrahydropyranyl group, etc.; and n denotes an integer from 1 to 3.
The photoresist polymeric compound can exhibit high adhesion to substrates and can highly precisely form fine patterns.
一种光致抗蚀剂聚合化合物包括下式(I)所代表的单体单元:
该聚合化合物还可进一步包括下式(IIa)至(IIg)所代表的单体单元中的至少一种:
其中 R1、R13、R14 和 R15 各为氢原子或甲基;R2 和 R3 各为具有 1 至 8 个碳原子的烃基;R4、R5 和 R6 各为氢原子、羟基或甲基;R7 和 R8 各为氢原子、羟基或-COOR9 基,其中 R9 为叔丁基、2-四氢吡喃基等。R10 和 R11 分别是氢原子、羟基或氧代基团;R12 是烃基,其上的三级碳原子与式中所示的氧原子成键;R16 是叔丁基、2-四氢吡喃基等;n 表示 1 至 3 的整数。
这种光致抗蚀剂聚合物化合物对基底有很高的附着力,并能高度精确地形成精细图案。