Photosensitive polymer and photoresist composition having the same
申请人:Choi Sang-jun
公开号:US20070172760A1
公开(公告)日:2007-07-26
A photosensitive polymer for a photoresist and a photoresist composition having the same are provided. The photosensitive polymer for a photoresist includes the repeating unit represented by the formula below:
wherein R
1
is a C
1
-C
20
hydrocarbon group or a C
1
-C
20
hetero hydrocarbon group including at least one hetero atom selected from the group consisting of nitrogen, fluorine and sulfur.