RUTHENIUM COMPOUND, MATERIAL FOR THIN FILM FORMATION, AND PROCESS FOR THIN FILM FORMATION
申请人:ADEKA CORPORATION
公开号:US20160272664A1
公开(公告)日:2016-09-22
Disclosed is a ruthenium compound useful as a precursor in chemical vapor growth, particularly ALD. The compound has good reactivity with a reactive gas, a high vapor pressure, and a low melting point. The compound is represented by general formula (I), wherein R
1
, R
2
, and R
3
each independently represent a straight or branched chain alkyl group having 1 to 5 carbon atoms, provided that the total number of the carbon atoms of R
1
and R
2
is 3 to 10. In formula (I), R
1
and R
2
are each preferably ethyl or isopropyl.
本发明涉及一种钌化合物,可用作化学气相生长(特别是ALD)的前体。该化合物与反应气体具有良好的反应性,具有高蒸气压和低熔点。该化合物由通式(I)表示,其中R1,R2和R3各自独立地表示具有1至5个碳原子的直链或支链烷基,前提是R1和R2的碳原子总数为3至10。在式(I)中,R1和R2最好分别为乙基或异丙基。