申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20030198891A1
公开(公告)日:2003-10-23
An ester compound of the following formula (1) is provided.
1
R
1
is H, methyl or CH
2
CO
2
R
3
, R
2
is H, methyl or CO
2
R
3
, R
3
is C
1
-C
15
alkyl, k is 0 or 1, Z is a divalent C
2
-C
20
hydrocarbon group which forms a single ring or bridged ring with the carbon atom and which may contain a hetero atom, m is 0 or 1, n is 0, 1, 2 or 3, and 2m+n=2 or 3. A resist composition comprising as the base resin a polymer resulting from the ester compound is sensitive to high-energy radiation, has excellent sensitivity, resolution, and etching resistance, and is suited for micropatterning using electron-beams or deep-UV.
提供了下式(1)的酯类化合物。
1
R
1
是 H、甲基或 CH
2
CO
2
R
3
, R
2
是 H、甲基或 CO
2
R
3
, R
3
是 C
1
-C
15
烷基,k 为 0 或 1,Z 为二价 C
2
-C
20
烃基,它与碳原子形成单环或桥环,并可含有杂原子,m 是 0 或 1,n 是 0、1、2 或 3,2m+n=2 或 3。由酯化合物产生的聚合物作为基树脂的抗蚀剂组合物对高能辐射敏感,具有优异的灵敏度、分辨率和抗蚀刻性,适合使用电子束或深紫外线进行微图案化。