“Tailor-made” carbonylylides bearing only alkyl substituents or no substituents were efficiently generated from α-chloroalkyl α′-chloroalkyl ethers in the presence of samarium reagents. Using these novel and synthetically practical carbonylylides, optionally substituted and stereochemically defined tetrahydrofurans, dihydrofurans and dioxolane were synthesized in a single step.
Basic compound, resist composition and patterning process
申请人:Watanabe Takeru
公开号:US20050008968A1
公开(公告)日:2005-01-13
Resist compositions comprising basic compounds having a benzimidazole skeleton and a polar functional group have an excellent resolution and an excellent focus margin and are useful in microfabrication using electron beams or deep-UV light.