申请人:TORAY INDUSTRIES, INC.
公开号:EP1388758A1
公开(公告)日:2004-02-11
A photosensitive resin precursor composition exhibiting an excellent film thickness uniformity contains: a heat resistant resin precursor polymer; a radiation sensitive compound; and a solvent expressed by formula (1):
R1 represents an alkyl group having a carbon number in the range of 1 to 3. R2, R3, R4, and R5 each represent hydrogen or an alkyl group having a carbon number in the range of 1 to 3, and 1 represents an integer in the range of 0 to 3.
一种具有优异膜厚均匀性的光敏树脂前体组合物包含:一种耐热树脂前体聚合物;一种辐射敏感化合物;以及一种由式(1)表示的溶剂:
R1 代表碳数在 1 至 3 之间的烷基。R2、R3、R4 和 R5 分别代表氢或碳原子数在 1 至 3 之间的烷基,1 代表 0 至 3 之间的整数。