Synthesis of New Heteroleptic Indium Complexes as Potential Precursors for Indium Oxide Thin Films
作者:Dagyum Yoo、Seong Ho Han、Sung Kwang Lee、Taeyong Eom、Bo Keun Park、Chang Gyoun Kim、Seung Uk Son、Taek‐Mo Chung
DOI:10.1002/ejic.202100276
日期:2021.7.7
resulting complexes were characterized by NMR and FT-IR spectroscopy, elemental analysis (EA), thermogravimetric analysis (TGA), and single crystal X-ray diffraction. TGA curves of all the complexes showed clear single-step weight losses, with low residual masses of 7–13 %. Among them, complex 5 was volatile and thermally stable, and thus, it can be used as potential indium precursor for indium oxide-based
新的杂配铟配合物,i。例如,[MeIn(mdpa)(tmhd)] 2 ( 2 )、[MeIn(mdpa)(acac)] 2 ( 3 )、[MeIn(edpa)(tmhd)] 2 ( 4 ) 和 [MeIn(edpa) )(acac)] 2 ( 5 ),具有三种不同的配体,带有N-烷氧基甲酰胺和 β-二酮酸酯被设计和合成为铟前体,通过原子层沉积 (ALD) 使用 [Me 2 In(edpa) )] 2和 [Me 2 In(mdpa)] 2 ( 1) 作为起始材料。所得配合物通过 NMR 和 FT-IR 光谱、元素分析 (EA)、热重分析 (TGA) 和单晶 X 射线衍射表征。所有复合物的 TGA 曲线都显示出明显的单步失重,残留质量低,为 7-13%。其中,配合物5具有挥发性和热稳定性,因此可用作氧化铟基薄膜的潜在铟前驱体。