申请人:Hoechst Celanese Corp.
公开号:US05726295A1
公开(公告)日:1998-03-10
A new class of 3,4-dihydrocoumarin derivatives which are useful as photoactive compounds in a wide variety of applications including photoresists and other opto-electronic applications are disclosed and claimed. Preferred embodiments include ether, ester, carbonate, and sulfonate derivatives of 5-hydroxy, 6-hydroxy, and 7-hydroxy-3-diazo-4-oxo-3,4-dihydrocoumarins. These compounds exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations.
一种新的3,4-二氢香豆素衍生物类别被揭示和声明,这些衍生物在各种应用中作为光敏化合物非常有用,包括光刻胶和其他光电应用。首选实施例包括5-羟基、6-羟基和7-羟基-3-重氮基-4-氧代-3,4-二氢香豆素的醚、酯、碳酸酯和磺酸盐衍生物。这些化合物在深紫外(DUV)区域(约250纳米)表现出非常高的光敏性,因此在DUV光刻胶配方中作为光敏化合物非常有用。