(1-Ethylcyclopentyl) 2-butanoyloxy-5-oxo-4-oxatricyclo[4.2.1.03,7]nonane-9-carboxylate

• 分子结构分类: 有机化合物 - 脂质和类脂质分子 - 异戊烯醇脂质
• 英文名称: (1-Ethylcyclopentyl) 2-butanoyloxy-5-oxo-4-oxatricyclo[4.2.1.03,7]nonane-9-carboxylate
• 英文别名: (1-ethylcyclopentyl) 2-butanoyloxy-5-oxo-4-oxatricyclo[4.2.1.03,7]nonane-9-carboxylate
• 化学式: C₂₀H₂₈O₆
• 分子量: 364.4
• InChiKey: FLMKWPDHLVPBBB-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  3
• 重原子数：
  26
• 可旋转键数：
  8
• 环数：
  4.0
• sp3杂化的碳原子比例：
  0.85
• 拓扑面积：
  78.9
• 氢给体数：
  0
• 氢受体数：
  6

文献信息

• Monomer, polymer, resist composition, and patterning process
  申请人：Shin-Etsu Chemical Co., Ltd.

  公开号：US10591819B2

  公开（公告）日：2020-03-17

  A monomer of formula (1a) or (1b) is provided wherein A is a polymerizable group, R1-R6 are monovalent hydrocarbon groups, X1 is a divalent hydrocarbon, group, Z1 is an aliphatic group, Z2 forms an alicyclic group, k=0 or 1, m=1 or 2, n=1 to 4. A useful polymer is obtained by polymerizing the monomer. A resist composition comprising the polymer has improved development properties and is processed to form a negative pattern having high contrast, high resolution and etch resistance which is insoluble in alkaline developer.

  提供了式 (1a) 或 (1b) 的单体，其中 A 为可聚合基团，R1-R6 为一价烃基团，X1 为二价烃基团，Z1 为脂肪族基团，Z2 为脂环族基团，k=0 或 1，m=1 或 2，n=1 至 4。包含该聚合物的抗蚀剂组合物具有更好的显影性能，经处理后可形成具有高对比度、高分辨率和抗蚀刻性的阴图，且不溶于碱性显影剂。
• MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS
  申请人：Shin-Etsu Chemical Co., Ltd.

  公开号：US20190235381A1

  公开（公告）日：2019-08-01

  A monomer of formula (1a) or (1b) is provided wherein A is a polymerizabie group, R 1 -R 6 are monovalent hydrocarbon groups, X 1 is a divalent hydrocarbon, group, Z 1 is an aliphatic group, Z 2 forms an alicyclic group, k=0 or 1, m=1 or 2, n=1 to 4. A useful polymer is obtained by polymerizing the monomer. A resist composition comprising the polymer has improved development properties and is processed to form a negative pattern having high contrast, high resolution and etch resistance which is insoluble in alkaline developer.