申请人:Tokyo Ohka Kogyo Co., Ltd.
公开号:US20130177854A1
公开(公告)日:2013-07-11
A resist composition including a base component (A) which exhibits changed solubility in a developing solution, and an acidic compound component (J) which is decomposed by exposure to exhibit decreased acidity, wherein the acidic compound component (J) contains a compound represented by formula (J1) [in the formula, R
1
represents H, OH, halogen atom, alkoxy group, hydrocarbon group or nitro group; m represents 0-4; n represents 0-3; Rx represents H or hydrocarbon group; X
1
represents divalent linking group; X
2
represents H or hydrocarbon group; Y represents single bond or C(O); A represents alkylene group which may be substituted with oxygen atom, carbonyl group or alkylene group which may have fluorine atom; Q
1
and Q
2
represents F or fluorinated alkyl group; and W
+
represents primary, secondary or tertiary ammonium coutercation which exhibits pKa smaller than pKa of H
2
N
+
(X
2
)—X
1
—Y—O-A-C(Q
1
)(Q
2
)—SO
3
−
generated by decomposition upon exposure].