Synthesis and Characterization of Volatile, Fluorine-Free β-Ketoiminate Lanthanide MOCVD Precursors and Their Implementation in Low-Temperature Growth of Epitaxial CeO<sub>2</sub> Buffer Layers for Superconducting Electronics
作者:Nikki L. Edleman、Anchuan Wang、John A. Belot、Andrew W. Metz、Jason R. Babcock、Amber M. Kawaoka、Jun Ni、Matthew V. Metz、Christine J. Flaschenriem、Charlotte L. Stern、Louise M. Liable-Sands、Arnold L. Rheingold、Paul R. Markworth、Robert P. H. Chang、Michael P. Chudzik、Carl R. Kannewurf、Tobin J. Marks
DOI:10.1021/ic020299h
日期:2002.10.1
substituents on the keto, imino, and ether sites of the ligand. Direct comparison with conventional lanthanide beta-diketonate complexes reveals that the present precursor class is a superior choice for lanthanideoxide MOCVD. Epitaxial CeO(2) buffer layer films can be grown on (001) YSZ substrates by MOCVD at significantly lower temperatures (450-650 degrees C) than previously possible by using one
Group 2 Metal Precursors For Deposition Of Group 2 Metal Oxide Films
申请人:Lei Xinjian
公开号:US20100119726A1
公开(公告)日:2010-05-13
This invention is related to Group 2 metal-containing polydentate β-ketoiminate precursors and compositions comprising Group 2 metal-containing polydentate β-ketoiminate precursors, wherein the polydentate β-ketoiminate precursors incorporate an alkoxy group in the imino portion of the molecule. The compounds and compositions are useful for fabricating metal containing films on substrates such as silicon, metal nitride, metal oxide and other metal layers via chemical vapor deposition (CVD) processes.
Group 2 metal precursors for deposition of group 2 metal oxide films
申请人:Air Products and Chemicals, Inc.
公开号:EP2184287A1
公开(公告)日:2010-05-12
This invention is related to Group 2 metal-containing polydentate β-ketoiminate precursors and compositions comprising Group 2 metal-containing polydentate β-ketoiminate precursors, wherein the polydentate β-ketoiminate precursors incorporate an alkoxy group in the imino portion of the molecule. The compounds and compositions are useful for fabricating metal containing films on substrates such as silicon, metal nitride, metal oxide and other metal layers via chemical vapor deposition (CVD) processes.