Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition and resist film
申请人:FUJIFILM CORPORATION
公开号:US10248019B2
公开(公告)日:2019-04-02
A pattern forming, method, includes: (i) forming a film from an actinic ray-sensitive or radiation-sensitive resin composition that contains (A) a compound capable of generating an acid upon irradiation with an actinic ray or radiation and decomposing by an action of an acid to decrease a solubility of the compound (A) for an organic solvent; (ii) exposing the film; and (iii) performing development by using a developer containing an organic solvent.
MONOMERS, POLYMERS AND LITHOGRAPHIC COMPOSITIONS COMPRISING SAME
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20190202955A1
公开(公告)日:2019-07-04
New monomer and polymer materials that comprise one or more Te atoms. In one aspect, tellurium-containing monomers and polymers are provided that are useful for Extreme Ultraviolet Lithography.
The present invention relates to new photoresist compositions that comprise (a) a polymer comprising an acid generator bonded thereto; and (b) an acid generator compound that is not bonded to the polymer and that comprises one or more acid-labile groups.
ACID GENERATOR COMPOUNDS AND PHOTORESISTS COMPRISING SAME
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20140080060A1
公开(公告)日:2014-03-20
Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, cyclic sulfonium salt and photoresist compositions that comprise such compounds are provided. In another preferred aspect, acid generator compounds are provided that comprise one or more covalently linked acid-labile moieties, particularly ester-containing acid-labile moieties.
Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the composition and pattern forming method
申请人:Inasaki Takeshi
公开号:US08735048B2
公开(公告)日:2014-05-27
An actinic ray-sensitive or radiation-sensitive resin composition comprising (P) a resin having a repeating unit represented by the following formula (1), a resist film using the composition, and a pattern forming method.